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Series  010   Mini UHV gate valve Area of application: The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems. Description: Mini-UHV-gate valves are for many applicatiaons. They can be provided with various actuators. The mechanism is free of lubricants. Nominal inside diameters (ID): 25 (1") - 50 (2") Body material: Stainless steel Actuator types: Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC) Feedthrough: Bellow Sealing technology: MONOVAT-System Sealing materials: Bonnet: Metal / Gate: FKM (VITON®) Cycles until first service: 50'000 cycles Leak rate: Body: < 5 . 10-10 mbar ls-1 Valve seat: < 1 . 10-9 mbar ls-1 ID:  * 25 (1") 40 (1 1/2") 50 (2") Flange:  * CF-F fixed flange metric threads (compatible with ISO 3669 Fig.2) CF-F fixed flange UNF threads (compatible with ISO 3669 Fig.2) ISO-KF (compatible with ISO 2861 T1) Actuator:  * Hand wheel Manual with position indicator Pneumatic with position indicator with solenoid double acting Pneumatic with position indicator with solenoid single acting closing spring Pneumatic with position indicator no solenoid double acting Pneumatic with position indicator no solenoid single acting closing spring Pneumatic no position indicator no solenoid double acting Pneumatic no position indicator no solenoid single acting closing spring › Details Options Catalog pages Accessories

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